Research Facilities

Multi-beam Ultra-high Voltage Electron Microscope(ARM-1300)
マルチビーム超高圧電子顕微鏡(ARM-1300)

Instrument ： JEM-ARM-1300

Specification

Accelerating voltage：1250kV(max 1300kV)

Point-to-point resolution：0.118nm

Attachment

Double tilt holder

Double tilt heating holder

Double tilt liquid nitrogen cooling holder

Ion accelerator　(H+, He+, Ar+, Ne+)

Ion accelerator　(Ti+, Ni+, Fe+, Ag+)

CCD camera

Laser equipment (Continuous Wave He-Cd laser/Nanosecond pulsed YAG laser/Femtosecond pulsed laser)

Primary use

Observation of ultra-high resolution structure image and lattice image

Observation of thick film sample

In-situ observation of microstructural change during heating/ cooling processes

In-situ observation of ion implantation/radiation damage behaviors