Equipments

Atomospheric pressure chemical vapor deposition

Evaporated source is transported into the reaction regime at high temperature.
Thin film or nanowire can be fabricated using the CVD.

Microwave plasma-enhanced chemical vapor deposition

Source gas is activated into plasam with microwave.
Diamond and cubic boron nitride (c-BN) can be synthesized.

UHV-MBE (organic and inorganic), Angle-resolved Photoemission Spectroscopy

RF plasma-enhanced chemical vapor deposition

Source gas is activated into plasam with high-frequency electric field.
Diamond like carbon or carbon nanotube can be synthesized.

Glove box

Reactive chemicals can be handled in it under nitrogen atmosphere (without moisture and oxygen)

High-frequency induction furnace

Super high temperature (～2600℃) can be achieved within several seconds using high frequency induction heating.

 

LT-STM

FE-SEM

etc.