Laboratory of Plasma Processing for Materials Engineering
As of October 18, 2021
Basic information
Division
Quantum Science and Engineering
* Please go to Courses to see the list of subjects offered by the division.
Laboratory's URL
https://www.eng.hokudai.ac.jp/labo/pmel_a/index.html
Faculty members accepting applicants
TOMITA Kentaro (Assoc. Prof.), NOBUTA Yuji (Assist. Prof.)
About the laboratory
Description
“Ionized gas” refers to a state where the gas is partially or fully ionized. Although it is often also called "plasma", there are in fact several conditions regarding temperature and electron concentration that must be satisfied. The ionized gas refers to a broader range of states in a broader sense including plasma. Particles such as ions, electrons, and radicals that are contained in ionized gasses are in a high-energy conditions state, and they can create a non-equilibrium process by reacting to gasses and solid matters. Therefore, these ionized gasses are applied to various fields involving materials, energy, and the environment.
“Lasers” is are closely related to ionized gasses, as some types of laser systems include ionized gasses. Lasers are also used as a tool to create and measure high-temperature ionized gasses.
In our laboratory, we carry out researches in cutting-edge advanced fields concerning ionized gasses, plasmas, and lasers.
Organization of research
For Master course students, we first will introduce how the plasma experimental research is performed. Especially, in our lab., we usually use high-power lasers as a tool to produce or measure plasmas. We are focusing on applied engineering fields of plasmas. For example, we are focusing on plasma applications for EUV and soft X-ray light sources using laser-produced plasmas, atmospheric discharge plasmas that have potential in various fields such as agriculture, bio, medical, etc., and semiconductor processing plasma (low-temperature and wide-area plasma). To perform cutting-edge research, as an approach, we are focusing on diagnosing and control electron properties of plasmas, such as electron density, electron temperature, averaged ionic charges, and flow velocity, which is very fundamental and prerequisite parameters to understand and use plasmas. We fabricate a custam-made spectrometer and detect very small (single-photon lever) signals to know these plasma parameters. Therefore, in this lab, the master course students will be able to learn how to fabricate spectrometers, to use laser tools, and plasma itself.
For Doctor course students, they will try to solve ongoing problems concerning plasma engineering. For example, in our lab., we are trying to make a new method to monitor the plasma temperature of EUV or Soft X-ray light source plasmas. Plasma temperature (electron temperature) of them are up to 100 eV (about a million K), and the light-emitting from these plasmas strongly depends on temperature. Therefore, light source companies really want to monitor the temperature because it is impossible to optimize light source conditions without it. One of our ongoing research is to monitor the EUV light source plasma, which is used as inspection light for lithography mask system, called as "actinic inspection". This theme is just one example. We have many ongoing projects, which need the original technology of our lab. We need powerful students to proceed and open new plasma engineering research!
Enrolled students' research topics
Actually the two staff of this lab. (Prof. Tomita and Prof. Nobut) have a little bit different research theme. Before entering our lab., we recommend you ask us about research themes that you can conduct.
Information for potential applicants
How to apply
Please follow the application procedure for the respective application category announced at the e3 web page.
Availability of financial support
Please check the e3 web page for information about the scholarships and other financial support.
Inquiries
If you have any inquiries about the application and admission procedures etc., please contact the e3 office. You can submit your application on-line during the "matching period" irrespective of prior contact with potential supervisor(s).