|
|
Preface
Ultimate clean energy source for human is
"fusion". Fusion takes place
in an ultra-high temperature plasma, releasing extremely high energy. As R&Ds of fusion reactor, we have
conducted the works concerning fusion plasma physics, plasma particle &
heat control and plasma facing walls.
One of major applications utilizing plasma is
"production of semiconductor" based on etching and deposition. For this work, we have numerous new materials
by controlling plasma state.
Return to Home page of
Division of Quantum Energy Engineering
Division of Quantum Energy Engineering
Hokkaido University
Fax +81-11-709-6413
tomhino@qe.eng.hokudai.ac.jp